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Multi-Zone Baking Hot Plate Product Introduction
High-efficiency Photolithography Baking Solution — WH-HP-02/03 Multi-Zone Baking Hot Plate In micro-nano fabrication and photolithography processes, the temperature consistency and efficiency of photoresist baking (soft bake, intermediate bake, post bake) directly determine patterning quality and process repeatability. Conventional single-zone baking hot plates require frequent temperature rise and fall when multiple temperature setpoints are needed, which [...]
